ASML expects production at its Berlin factory to return to normal by the end of next month at the latest, a company spokesperson confirmed to Bits&Chips. A fire at the former Berliner Glass site caused quite extensive damage early January, particularly to an area in use for manufacturing EUV wafer clamps. DUV component manufacturing was swiftly resumed, but restoring wafer clamp production would take longer, ASML said. The spokesperson reiterated that the fire won’t have an impact on EUV output this year.
To absorb the inevitable delays in clamp production, ASML said it would start integrating them into new equipment at the latest possible moment, perhaps even after shipping. Another mitigating measure is to try and make existing clamps last longer – they’re subject to wear and tear and need to be replaced at regular intervals. Delaying clamp replacements helps to make more clamps available for newly manufactured equipment.