Assembly of ASML’s inaugural high-NA EUV scanner is proceeding with only minor delays, working toward delivery of the tool later this year as planned. “A few suppliers had some difficulties in actually ramping up and also giving us the right level of technological quality, so that led to some delay. But in fact, the first shipment is still this year,” ASML CEO Peter Wennink told Reuters.
There are actually two high-NA tools being assembled in Veldhoven right now. One Twinscan EXE:5000 pre-production tool will remain there as part of a joint ASML-Imec high-NA research lab set up to accelerate high-NA process development. At a later date, ASML will install a Twinscan EXE:5200 full-production system in Imec’s cleanroom in Leuven.
The other EXE:5000 will be shipped later this year, most likely to Intel. In a joint statement issued in January 2022, ASML and Intel confirmed that the chip giant was the first to purchase the Twinscan EXE:5000 system. Intel says it will also be first to take delivery of the EXE:5200 when available.