Paul van Gerven
9 January 2023

ASML’s EUV scanner at Intel’s Fab 34 in Ireland has generated light for the first time. Installation of the system, in the words of Intel “arguably the most complicated piece of machinery humans have ever built,” started in April last year. Over 100 ASML staff have been supporting the build and setup of the system, together with teams of trade contractors, Intel engineers and technicians. Once ready, the scanner will pattern the most challenging layers of Intel 4 chips. This node, which Intel says is ready for manufacturing, will be the company’s first to fully utilize EUV technology.

Intel Ireland EUV scanner
The team celebrates the milestone in the setup of ASML’s EUV scanner. Credit: Intel