The Dutch government has finalized export restrictions for semiconductor manufacturing equipment used in the production of advanced ICs. Published in the government gazette (‘Staatscourant’) on Friday 30 June, the measures will come into effect 1 September. Both ASML and ASM are affected.
In a statement, ASML confirms it will need to apply for government permission to ship of its most advanced DUV immersion scanners, the Twinscan NXT:2000i and subsequent models. Although the regulations don’t mention China specifically, it’s no secret that applications for shipments of said tools to Chinese customers are expected to be denied.
According to a Reuters report, the US is not satisfied with the Dutch restrictions and is preparing additional rules to curb the sale of older DUV models as well. Through the so-called Foreign-Direct Product Rule (FDPR), the US claims jurisdiction over every piece of technology that has US origins. Until now, the FDPR didn’t affect ASML’s products because these didn’t contain enough US components. But now the US is planning on lowering the percentage of US technology required for the rule to apply, a person familiar with the matter told Reuters.
The newly published export controls also mention restrictions for atomic layer deposition, epitaxy and plasma deposition equipment – tools that are sold by ASM. The sale of any technology required for developing, manufacturing or using these chip-making tools (including lithographic ones) is curbed as well, meaning Chinese customers can’t turn to ASML’s or ASM’s suppliers for advanced parts.
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Bits&Chips has inquired at ASM which, if any, tools are affected by the ban. This article will be updated once we receive response