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ASML DUV 20210408

8 April 2021

ASML reduces DUV overlay error to 1 nanometer

In a balancing game between precision and productivity, ASML has increased the throughput to 295 wafers per hour, while reaching an overlay error milestone of 1 nanometer in its new Twinscan NXT:2050i. The first 15 systems have already been shipped.