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TU Delft ASML 20210304

4 March 2021

TU Delft and ASML take ultrasound to the nanoscale

A new imaging technique being developed by TU Delft and ASML, augmenting an atomic force microscope with ultrahigh-frequency ultrasound functionality, could reveal sub-surface structures with single-digit nanometer resolution, making it an excellent candidate to expand the semiconductor industry’s metrology toolkit.