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Besi holds the best cards in advanced packaging, but the game has only just begun

René Raaijmakers
Reading time: 13 minutes

Die-to-wafer hybrid bonding is about to penetrate advanced chip systems for servers, data centers and later possibly cell phones. Back-end equipment builder Besi and partner Applied Materials are in the front row with their machines.

Expectations for hybrid bonding are high, and Richard Blickman, CEO of BE Semiconductor Industries (Besi), likes to drive the enthusiasm. “Hybrid bonding, that’s what you all came for,” he said when welcoming investors and analysts at Besi’s Capital Markets Day last June. The new interconnection technology should provide a new growth spurt for the Netherlands-based company in the coming years.

In technical terms, die-to-wafer hybrid bonding is a fascinating process. It precisely layers a bare, clean and very flat chip onto a wafer that has undergone the same beauty treatment. The surfaces must be clean at virtually atomic level, and then there’s the crucial operation of precisely mirroring and bonding the insulating silicon oxide and copper contacts. In a super-clean environment and with the right mechanical-chemical treatments, this creates a sandwich of integrated circuits with thermal and mechanical properties very similar to a monolithic chip.

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