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ASML to ship high-NA tool to TSMC this year
TSMC will take delivery of a high-NA EUV system later this year, an ASML spokesperson confirmed to Bloomberg. The fact that the Taiwanese foundry has ordered a tool isn’t surprising, since ASML previously said that all current EUV customers have done so. But the timing of the shipment hadn’t been revealed until now.
![](https://bits-chips.nl/wp-content/uploads/2024/06/ASML-high-NA-cleanroom-Veldhoven-069.jpg)
TSMC recently voiced concerns about high-NA’s cost-effectiveness, prompting speculation that the firm might not be among the first to receive a tool. That’s not the case, but neither will it be a front-runner in high-NA adoption. That role has been assumed by Intel.