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ASML for beginners
Reading time: 4 minutes
ASML’s exposure devices are the most expensive and complex link in the chip fabrication process. Here, we take a simplified look at both the entire process and the Veldhoven company’s specific expertise. Plus: a list of must-know terms to understand ASML’s work.
– 193 nm: Wavelength in the far UV range. Currently in standard use for the production of the most advanced chips. See also: DUV, excimer laser and immersion.
– Alignment: Lining up the wafer and the lens in order to make the overlay (see the definition) as small as possible. ASML made a name for itself in the 1980s with an alignment system based on a reference mark, a symbol still visible in the company’s logo.
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